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Mechanical properties of boron nitride thin films obtained by rf-pecvd at low temperatures

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Dettagli Bibliografici
Autore principale:	J. Vilcarromero
Natura:	Artículo científico
Lingua:	en
Pubblicazione:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
Soggetti:	Física, Astronomía y Matemáticas
Accesso online:	Acceder al recurso
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

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