Formation of electrical conductive hard-carbon (DLC) films using i C4H10/N2 supermagnetron plasma
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| Main Author: | Jun Takahashi |
|---|---|
| Format: | Artículo científico |
| Language: | en |
| Published: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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