Bias enhanced nucleation process of polycrystalline diamond films
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| Format: | Artículo científico |
| Sprache: | en |
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Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| author | J. M. Albella |
| author_facet | J. M. Albella |
| contents | Bias enhanced nucleation process of polycrystalline diamond films J. M. Albella M.M. García O. Sánchez C. Gómez Aleixandre Física, Astronomía y Matemáticas AFM roughness BEN process diamond films We have studied the bias-enhanced nucleation process in the deposition of diamond films by Microwave Plasma Assisted Chemical Vapor Deposition Process (MWCVD). We have found a clear dependence between the nucleation time and the surface morphology of the polycrystalline diamond films whereas the chemical composition remains unalterable. Smooth surface diamond films are obtained applying long bias enhanced nucleation processes prior to growth step 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200930 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| format | Artículo científico |
| id | redalyc_94200930 |
| institution | Redalyc |
| language | en |
| publishDate | 1999 |
| publisher | Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. |
| spellingShingle | Bias enhanced nucleation process of polycrystalline diamond films J. M. Albella Física, Astronomía y Matemáticas AFM roughness BEN process diamond films Bias enhanced nucleation process of polycrystalline diamond films J. M. Albella M.M. García O. Sánchez C. Gómez Aleixandre Física, Astronomía y Matemáticas AFM roughness BEN process diamond films We have studied the bias-enhanced nucleation process in the deposition of diamond films by Microwave Plasma Assisted Chemical Vapor Deposition Process (MWCVD). We have found a clear dependence between the nucleation time and the surface morphology of the polycrystalline diamond films whereas the chemical composition remains unalterable. Smooth surface diamond films are obtained applying long bias enhanced nucleation processes prior to growth step 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200930 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| title | Bias enhanced nucleation process of polycrystalline diamond films |
| topic | Física, Astronomía y Matemáticas AFM roughness BEN process diamond films |
| url | https://www.redalyc.org/articulo.oa?id=94200930 |