Properties of DLC and CNx PECVD coatings
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| Natura: | Artículo científico |
| Lingua: | en |
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Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| _version_ | 1876460850743607296 |
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| author | F. Cerny |
| author_facet | F. Cerny |
| contents | Properties of DLC and CNx PECVD coatings F. Cerny J. Gurovic J. Smolik J. Macl Z. Bryknar V. Hnatowicz Física, Astronomía y Matemáticas DLC coating CNx coating PECVD method Carbon based thin films have been prepared by PECVD method. Silicon and steel substrates were used for thin films preparation. Deposition was carried out under various conditions. Plasma was generated by RF (13.56 MHz) discharge. Investigation of theproperties of deposited thin films has been carried out by IR spectroscopy, Raman spectroscopy, X-ray diffraction, proton scattering, scanning electron microscopy and by measurement of Vickers microhardness. Various bonds between carbon, nitrogen, hydrogen and also oxygen were observed. For all the conditions used the coatings were amorphous. In the case of thicker coatings bad adhesion was observed on both substrates 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200933 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| format | Artículo científico |
| id | redalyc_94200933 |
| institution | Redalyc |
| language | en |
| publishDate | 1999 |
| publisher | Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. |
| spellingShingle | Properties of DLC and CNx PECVD coatings F. Cerny Física, Astronomía y Matemáticas DLC coating CNx coating PECVD method Properties of DLC and CNx PECVD coatings F. Cerny J. Gurovic J. Smolik J. Macl Z. Bryknar V. Hnatowicz Física, Astronomía y Matemáticas DLC coating CNx coating PECVD method Carbon based thin films have been prepared by PECVD method. Silicon and steel substrates were used for thin films preparation. Deposition was carried out under various conditions. Plasma was generated by RF (13.56 MHz) discharge. Investigation of theproperties of deposited thin films has been carried out by IR spectroscopy, Raman spectroscopy, X-ray diffraction, proton scattering, scanning electron microscopy and by measurement of Vickers microhardness. Various bonds between carbon, nitrogen, hydrogen and also oxygen were observed. For all the conditions used the coatings were amorphous. In the case of thicker coatings bad adhesion was observed on both substrates 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200933 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| title | Properties of DLC and CNx PECVD coatings |
| topic | Física, Astronomía y Matemáticas DLC coating CNx coating PECVD method |
| url | https://www.redalyc.org/articulo.oa?id=94200933 |