Formation Process and Material Properties of Reactive Sputtered IrO2 Thin Films
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Redalyc
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| Main Author: | R. H. Horng |
|---|---|
| Format: | Artículo científico |
| Language: | en |
| Published: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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