Deposition of carbon nitride films by reactive sub-picosecond pulsed laser ablation
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| Natura: | Artículo científico |
| Lingua: | en |
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Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| _version_ | 1876437861222318080 |
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| author | S. Acquaviva |
| author_facet | S. Acquaviva |
| contents | Deposition of carbon nitride films by reactive sub-picosecond pulsed laser ablation S. Acquaviva A. Perrone A. Zocco A. Klini C. Fotakis Física, Astronomía y Matemáticas Sub Nitrides Thin Films Laser Ablation picosecond Laser We have deposited, for the first time, CNx films by sub-picosecond excimer laser ablation (KrF, l = 248 nm, tL = 0.5 ps) of graphite at 9 J/cm2 laser fluence in different nitrogen pressures.In this paper we discuss the obtained film properties, as a result of several diagnostic techniques (scanning electron microscopy, profilometry, X-ray photoelectron spectroscopy, Fourier transform infrared and Raman spectroscopies), in terms of different physical mechanisms involved in reactive laser ablation process when graphite target is ablated in nitrogen atmosphere by lasers with different pulse duration. The deposition rate, the nitrogen concentration and the amount of the carbon, bounded to nitrogen atoms, are extremely reduced respects to the ones in the films deposited by nanosecond lasers. Moreover, the high particulate and droplet density, one of the worst drawbacks of laser deposition technique, is not decreased 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200945 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| format | Artículo científico |
| id | redalyc_94200945 |
| institution | Redalyc |
| language | en |
| publishDate | 1999 |
| publisher | Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. |
| spellingShingle | Deposition of carbon nitride films by reactive sub-picosecond pulsed laser ablation S. Acquaviva Física, Astronomía y Matemáticas Sub Nitrides Thin Films Laser Ablation picosecond Laser Deposition of carbon nitride films by reactive sub-picosecond pulsed laser ablation S. Acquaviva A. Perrone A. Zocco A. Klini C. Fotakis Física, Astronomía y Matemáticas Sub Nitrides Thin Films Laser Ablation picosecond Laser We have deposited, for the first time, CNx films by sub-picosecond excimer laser ablation (KrF, l = 248 nm, tL = 0.5 ps) of graphite at 9 J/cm2 laser fluence in different nitrogen pressures.In this paper we discuss the obtained film properties, as a result of several diagnostic techniques (scanning electron microscopy, profilometry, X-ray photoelectron spectroscopy, Fourier transform infrared and Raman spectroscopies), in terms of different physical mechanisms involved in reactive laser ablation process when graphite target is ablated in nitrogen atmosphere by lasers with different pulse duration. The deposition rate, the nitrogen concentration and the amount of the carbon, bounded to nitrogen atoms, are extremely reduced respects to the ones in the films deposited by nanosecond lasers. Moreover, the high particulate and droplet density, one of the worst drawbacks of laser deposition technique, is not decreased 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200945 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| title | Deposition of carbon nitride films by reactive sub-picosecond pulsed laser ablation |
| topic | Física, Astronomía y Matemáticas Sub Nitrides Thin Films Laser Ablation picosecond Laser |
| url | https://www.redalyc.org/articulo.oa?id=94200945 |