Electrical properties of Ir-silicide formation on p-Si(100) in ultra high vacuum

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Bibliographic Details
Main Author:	C.K. Chung
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
Subjects:	Física, Astronomía y Matemáticas Ir silicide epitaxial ideality factor ultra high vacuum
Online Access:	Acceder al recurso
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