Characterization of sputtered Ta-Ru thin films for ink-jet heater applications
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Redalyc
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| Auteur principal: | C. C. Chan |
|---|---|
| Format: | Artículo científico |
| Langue: | en |
| Publié: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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