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Characterization of sputtered Ta-Ru thin films for ink-jet heater applications

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Dettagli Bibliografici
Autore principale:	C. C. Chan
Natura:	Artículo científico
Lingua:	en
Pubblicazione:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
Soggetti:	Física, Astronomía y Matemáticas
Accesso online:	Acceder al recurso
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