APA (7th ed.) Citation

Laurila, T. (1999). Chemical Stability of Ta Diffusion Barrier Between Cu and Si. Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.

Chicago Style (17th ed.) Citation

Laurila, T. Chemical Stability of Ta Diffusion Barrier Between Cu and Si. Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C, 1999.

MLA (9th ed.) Citation

Laurila, T. Chemical Stability of Ta Diffusion Barrier Between Cu and Si. Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C, 1999.

Warning: These citations may not always be 100% accurate.