Micromachining of stabilised porous silicon with several morphological features
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| Format: | Artículo científico |
| Sprache: | en |
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Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| _version_ | 1876485673305767936 |
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| author | W. Calleja |
| author_facet | W. Calleja |
| contents | Micromachining of stabilised porous silicon with several morphological features W. Calleja R. Osorio C. Vásquez S. Quintana C. Falcony Física, Astronomía y Matemáticas Porous Silicon Photoluminescence Cathodoluminescence Silicon Micromachining A micromachining process on stabilised luminescent porous silicon (PS) using KOH was performed, for the purpose of using it in microstructures fabrication. A selective etching process using KOH aqueous solutions was developed to isolate luminescent PS regions with controlled geometrical features. As anodized PS and stabilised micromachined PS were analysed using photoluminescence and cathodoluminescence tools. The micromachining technique developed in this work is compatible with the standard MOS technology, which is to be applied to fabricate silicon luminescent microstructures 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200962 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| format | Artículo científico |
| id | redalyc_94200962 |
| institution | Redalyc |
| language | en |
| publishDate | 1999 |
| publisher | Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. |
| spellingShingle | Micromachining of stabilised porous silicon with several morphological features W. Calleja Física, Astronomía y Matemáticas Porous Silicon Photoluminescence Cathodoluminescence Silicon Micromachining Micromachining of stabilised porous silicon with several morphological features W. Calleja R. Osorio C. Vásquez S. Quintana C. Falcony Física, Astronomía y Matemáticas Porous Silicon Photoluminescence Cathodoluminescence Silicon Micromachining A micromachining process on stabilised luminescent porous silicon (PS) using KOH was performed, for the purpose of using it in microstructures fabrication. A selective etching process using KOH aqueous solutions was developed to isolate luminescent PS regions with controlled geometrical features. As anodized PS and stabilised micromachined PS were analysed using photoluminescence and cathodoluminescence tools. The micromachining technique developed in this work is compatible with the standard MOS technology, which is to be applied to fabricate silicon luminescent microstructures 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200962 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| title | Micromachining of stabilised porous silicon with several morphological features |
| topic | Física, Astronomía y Matemáticas Porous Silicon Photoluminescence Cathodoluminescence Silicon Micromachining |
| url | https://www.redalyc.org/articulo.oa?id=94200962 |