Gas sensitive thin inorganic and organic layers prepared by pulsed laser deposition
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| Format: | Artículo científico |
| Sprache: | en |
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Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| author | F. Vyslouil |
| author_facet | F. Vyslouil |
| contents | Gas sensitive thin inorganic and organic layers prepared by pulsed laser deposition F. Vyslouil V. Myslík M. Vròata J. Zemek J. Lancok M. Jelínek Física, Astronomía y Matemáticas acetonate tin acetyl tin dioxide laser deposition chemical sensors Thin active layers of chemical sensors were deposited from tin dioxide and tin acetylacetonate (SnAcAc) targets by the pulsed laser deposition (PLD) method. The deposition was made by employing excimer KrF laser (wavelength 248nm, energy density 0.3- 2.5 J.cm-2, pulse duration 16 ns). The Pt-electrodes in the interdigital configuration serve for reading of the sensor response - DC resistance of active layer. Under reducing gases the resistance of the active layer decreases (1000 ppm H2 ~ 2-3 orders). For the stabilisation of sensor properties it is necessary to use dopants (compounds of Ni). In this case the PLD technology enables an original solution- introduction of dopants as a multilayered structure. In order to improve the sensor parameters, catalytic Pt or Pd is vaporised to the surface of active layer in the form of non-aggregated particles 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200969 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| format | Artículo científico |
| id | redalyc_94200969 |
| institution | Redalyc |
| language | en |
| publishDate | 1999 |
| publisher | Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. |
| spellingShingle | Gas sensitive thin inorganic and organic layers prepared by pulsed laser deposition F. Vyslouil Física, Astronomía y Matemáticas acetonate tin acetyl tin dioxide laser deposition chemical sensors Gas sensitive thin inorganic and organic layers prepared by pulsed laser deposition F. Vyslouil V. Myslík M. Vròata J. Zemek J. Lancok M. Jelínek Física, Astronomía y Matemáticas acetonate tin acetyl tin dioxide laser deposition chemical sensors Thin active layers of chemical sensors were deposited from tin dioxide and tin acetylacetonate (SnAcAc) targets by the pulsed laser deposition (PLD) method. The deposition was made by employing excimer KrF laser (wavelength 248nm, energy density 0.3- 2.5 J.cm-2, pulse duration 16 ns). The Pt-electrodes in the interdigital configuration serve for reading of the sensor response - DC resistance of active layer. Under reducing gases the resistance of the active layer decreases (1000 ppm H2 ~ 2-3 orders). For the stabilisation of sensor properties it is necessary to use dopants (compounds of Ni). In this case the PLD technology enables an original solution- introduction of dopants as a multilayered structure. In order to improve the sensor parameters, catalytic Pt or Pd is vaporised to the surface of active layer in the form of non-aggregated particles 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200969 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9 |
| title | Gas sensitive thin inorganic and organic layers prepared by pulsed laser deposition |
| topic | Física, Astronomía y Matemáticas acetonate tin acetyl tin dioxide laser deposition chemical sensors |
| url | https://www.redalyc.org/articulo.oa?id=94200969 |