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| Autore principale: | |
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| Natura: | Artículo científico |
| Lingua: | en |
| Pubblicazione: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Accesso online: | https://www.redalyc.org/articulo.oa?id=94200971 |
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Sommario:
- Structure determination on (Ti,Al)N/Mo multilayers for hard coatings C.J. Tavares L. Rebouta E.J. Alves Física, Astronomía y Matemáticas (Ti,Al)N/Mo multilayers have been deposited by dc magnetron sputtering on high-speed steel and silicon substrates. Experimental X-ray diffraction (XRD) and computational refinement of these patterns has undergone to achieve the basics to elucidate their structural properties. They were designed with modulation periods of approximately 14 nm, up to a total thickness of 2.8 mm. Residual stress experiments revealed a compressive stress state that prevailed in these structures, ranging from 0.2 to 1.3 GPa. This in turn is in good agreement with the XRD-refined expanded values of the out-of-plane interplanar distances. RBS spectra provided the film composition and a qualitative evolution of the interlayer roughness with increasing substrate bias potential 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200971 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9