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| Formato: | Artículo científico |
| Lenguaje: | en |
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Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Acceso en línea: | https://www.redalyc.org/articulo.oa?id=94200975 |
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- Three-dimensional model for oxide thin film growth induced by laser heating of metallic surfaces J. L. Jiménez Pérez A. Cruz Orea P.H. Sakanaka M.A. Algatti J.G. Mendoza Alvarez Física, Astronomía y Matemáticas thin oxide films Laser induced oxidation laser materials processing This paper considers the theoretical modeling and the experimental investigation of TiO2 film growth on Ti films previously deposited over glass substrates. The Ti oxidation occurs due the film surface heating by a moving beam of a pulsed Nd:YAG laser that sweeps the surface at a constant speed of 2 mm/s, under the atmospheric environment. The model takes into account the self consistent solutions of the three dimensional heat diffusion and oxidation rate equations. Numerical results obtained for 100 and 200 pulses of 290 ns and 3.17 MW/cm2 with a repetition frequency of 100 and 200 Hz, showed that a maximum temperature of approximately 850 and 1200 K are reached after the action of the fiftieth pulse, respectively. It is observed the occurrence of surface cooling between two consecutive pulses up to the repetition frequency of 100 Hz, and that the surface temperature and the film thickness profiles closely match the gaussian shape of the laser beam space profile. This is a strong indicative that heat diffusion may be neglected during the laser pulse duration. Theoretical predictions for TiO2 film thickness dependence on laser intensity is in close agreement with the experimental data in the range between 2.4 and 3.2 MW/cm2 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200975 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9