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Laser deposition of CNx films combined with RF and hollow cathode discharges

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Bibliographic Details
Main Author:	J. Lanèok
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
Subjects:	Física, Astronomía y Matemáticas laser deposition carbon nitride films radiofrequency discharge hollow cathode discharge optical emission spectroscopy
Online Access:	Acceder al recurso
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