High deposition rate a-Si:H layers from pure SiH4 and from a 10% dilution of SiH4 in H2
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| Main Author: | |
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| Format: | Artículo científico |
| Language: | en |
| Published: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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