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| Format: | Artículo científico |
| Language: | en |
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Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2001
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| Online Access: | https://www.redalyc.org/articulo.oa?id=94201303 |
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| _version_ | 1866569187466412032 |
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| author | P. Mikulík |
| author_facet | P. Mikulík |
| contents | X-ray reflectivity study of a W/Si multilayer grating P. Mikulík I. Kostiè P. Hudek C. Falcony L. Ortega E. Majková E. Pineík . Luby M. Jergel Física, Astronomía y Matemáticas Quantum wires ray reflectivity Multilayer grating Lateral diffraction Grating truncation rods Multilayer gratings are artificially patterned multilyer thin films with the periodicities both in the lateral and normaldirections which renders them attracting for microelectronic and optical applications. A proper structural characterizationis of primary importance. To test the capability of the X-ray reflectometry technique to fulfil this task, a tungsten/siliconmultilayer grating prepared by electron beam evaporation and electron beam lithography was studied both in the coplanarand non-coplanar geometries., the nominal lateral and normal periods being 800 nm and 8 nm, respectively. The coplanarmeasurements were evaluated within the dynamical theory of X-ray scattering on rough gratings and provided thestructural parameters of a real structure with a reasonable precision which are close to the nominal ones. The resultsrevealed also some imperfections of the deposition and masking procedures which are discussed. The non-coplanarmeasurements were evaluated qualitatively using three-dimensional constructions in the reciprocal space. The advantageof the technique used is its non-destructive character and a simultaneous access both to the surface shape of the grating aswell as to its internal structure. 2001 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94201303 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.13 |
| format | Artículo científico |
| id | redalyc_94201303 |
| language | en |
| publishDate | 2001 |
| publisher | Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. |
| spellingShingle | X-ray reflectivity study of a W/Si multilayer grating P. Mikulík Física, Astronomía y Matemáticas Quantum wires ray reflectivity Multilayer grating Lateral diffraction Grating truncation rods X-ray reflectivity study of a W/Si multilayer grating P. Mikulík I. Kostiè P. Hudek C. Falcony L. Ortega E. Majková E. Pineík . Luby M. Jergel Física, Astronomía y Matemáticas Quantum wires ray reflectivity Multilayer grating Lateral diffraction Grating truncation rods Multilayer gratings are artificially patterned multilyer thin films with the periodicities both in the lateral and normaldirections which renders them attracting for microelectronic and optical applications. A proper structural characterizationis of primary importance. To test the capability of the X-ray reflectometry technique to fulfil this task, a tungsten/siliconmultilayer grating prepared by electron beam evaporation and electron beam lithography was studied both in the coplanarand non-coplanar geometries., the nominal lateral and normal periods being 800 nm and 8 nm, respectively. The coplanarmeasurements were evaluated within the dynamical theory of X-ray scattering on rough gratings and provided thestructural parameters of a real structure with a reasonable precision which are close to the nominal ones. The resultsrevealed also some imperfections of the deposition and masking procedures which are discussed. The non-coplanarmeasurements were evaluated qualitatively using three-dimensional constructions in the reciprocal space. The advantageof the technique used is its non-destructive character and a simultaneous access both to the surface shape of the grating aswell as to its internal structure. 2001 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94201303 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.13 |
| title | X-ray reflectivity study of a W/Si multilayer grating |
| topic | Física, Astronomía y Matemáticas Quantum wires ray reflectivity Multilayer grating Lateral diffraction Grating truncation rods |
| url | https://www.redalyc.org/articulo.oa?id=94201303 |