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Deviation from thermodynamic equilibrium at the initial stage of the GaN growth by metalorganic chemical vapor deposition (MOCVD)

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Bibliographic Details
Main Author:	V.A. Elyukhin
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2001
Subjects:	Física, Astronomía y Matemáticas GaN MOCVD Epitaxy Adsorption process
Online Access:	Acceder al recurso
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