XPS, AES and EELS study of the bonding character in CNx films
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| Format: | Artículo científico |
| Langue: | en |
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Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2002
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| _version_ | 1876454246945128448 |
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| author | R. Machorro |
| author_facet | R. Machorro |
| contents | XPS, AES and EELS study of the bonding character in CNx films R. Machorro L. Cota Araiza E. C. Sámano M. H. Farías G. Soto F. F. Castillón Física, Astronomía y Matemáticas XPS AES EELS Polymer Chemical state We discuss the possibility of using photoemitted electrons corresponding to carbon 1s, in order to resolve the chemicalstate and the hybridization character of carbon in amorphous carbon nitride films (a-CNx). A series of carbon nitridefilms were prepared at room temperature by ablating a graphite target in a background of molecular nitrogen in thepressure range from high vacuum to 500 mTorr. The films were analyzed by means of XPS, EELS and AES. XPS resultsshow the existence of two predominant binding states for both, nitrogen and carbon. The effect of heat treatment is todecrease the nitrogen content in the films, and the sharpening of the binding configuration of carbon. EELS resultsindicate that the films have predominantly sp2-hybridized carbon, before and after heat treatment, and no evidence ofcarbon in the sp3 configuration was found. Thereupon, we conclude that it is not feasible to determine the hybridizationstate for carbon from XPS measurements alone, and that the nitrogen and carbon are co-existent in a polymer-like film 2002 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94201509 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.15 |
| format | Artículo científico |
| id | redalyc_94201509 |
| institution | Redalyc |
| language | en |
| publishDate | 2002 |
| publisher | Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. |
| spellingShingle | XPS, AES and EELS study of the bonding character in CNx films R. Machorro Física, Astronomía y Matemáticas XPS AES EELS Polymer Chemical state XPS, AES and EELS study of the bonding character in CNx films R. Machorro L. Cota Araiza E. C. Sámano M. H. Farías G. Soto F. F. Castillón Física, Astronomía y Matemáticas XPS AES EELS Polymer Chemical state We discuss the possibility of using photoemitted electrons corresponding to carbon 1s, in order to resolve the chemicalstate and the hybridization character of carbon in amorphous carbon nitride films (a-CNx). A series of carbon nitridefilms were prepared at room temperature by ablating a graphite target in a background of molecular nitrogen in thepressure range from high vacuum to 500 mTorr. The films were analyzed by means of XPS, EELS and AES. XPS resultsshow the existence of two predominant binding states for both, nitrogen and carbon. The effect of heat treatment is todecrease the nitrogen content in the films, and the sharpening of the binding configuration of carbon. EELS resultsindicate that the films have predominantly sp2-hybridized carbon, before and after heat treatment, and no evidence ofcarbon in the sp3 configuration was found. Thereupon, we conclude that it is not feasible to determine the hybridizationstate for carbon from XPS measurements alone, and that the nitrogen and carbon are co-existent in a polymer-like film 2002 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94201509 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.15 |
| title | XPS, AES and EELS study of the bonding character in CNx films |
| topic | Física, Astronomía y Matemáticas XPS AES EELS Polymer Chemical state |
| url | https://www.redalyc.org/articulo.oa?id=94201509 |