Caracterización eléctrica mediante C-V y C-t de dispositivos MIS con oxinitruros de silicio depositados por LPCVD

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Bibliographic Details
Main Author:	Arturo Morales Acevedo
Format:	Artículo científico
Language:	es
Published:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2002
Subjects:	Física, Astronomía y Matemáticas
Online Access:	Acceder al recurso
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