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Structural, optical and mechanical properties of AlN films - effect of thickness

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Bibliographic Details
Main Author:	M. Aguilar Frutis
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2003
Subjects:	Física, Astronomía y Matemáticas 10 Eq 62 20 Qp
Online Access:	Acceder al recurso
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