Synthesis and characterization of a-CNx thin films prepared by laser ablation
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| Format: | Artículo científico |
| Sprache: | en |
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Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2004
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| _version_ | 1876432929184284672 |
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| author | S. Muhl |
| author_facet | S. Muhl |
| contents | Synthesis and characterization of a-CNx thin films prepared by laser ablation S. Muhl E. Camps A. Arrieta L. Escobar Física, Astronomía y Matemáticas CNx Laser ablation Carbon nitride Optical band gap Surface morphology Amorphous carbon nitride (a-CNx) thin films were synthesized by laser ablation on silicon (100) and glasssubstrates. The plasma was produced using the fundamental line of a Nd:YAG laser with 28 ns pulse durationfocused on a graphite target. Deposition of a-CN films was carried out in a nitrogen atmosphere in the range of pressures from 3 x 10-3 to 1.5 x 10-1 Torr. The laser fluences used in this work were varied from 9 to 46 J/cm2. Wehave carried out the characterization of the optical properties, composition and morphology of the thin films as afunction of the nitrogen pressure and the laser fluence used for deposition. The study of the optical propertiesshowed that the optical band gap diminishes as the pressure is increased. The compositional characterization showed the presence of carbon, nitrogen and oxygen in the deposited films; the nitrogen content increased as the pressure increases reaching a value of 29% in atomic concentration at a pressure of 7.5 x 10-2 Torr. The surface morphology of the deposited films was characterized by a roughening of the surface as the pressure increases; it is observed also that the roughness diminished as the laser fluence increased. 2004 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94217304 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.3 Vol.17 |
| format | Artículo científico |
| id | redalyc_94217304 |
| institution | Redalyc |
| language | en |
| publishDate | 2004 |
| publisher | Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. |
| spellingShingle | Synthesis and characterization of a-CNx thin films prepared by laser ablation S. Muhl Física, Astronomía y Matemáticas CNx Laser ablation Carbon nitride Optical band gap Surface morphology Synthesis and characterization of a-CNx thin films prepared by laser ablation S. Muhl E. Camps A. Arrieta L. Escobar Física, Astronomía y Matemáticas CNx Laser ablation Carbon nitride Optical band gap Surface morphology Amorphous carbon nitride (a-CNx) thin films were synthesized by laser ablation on silicon (100) and glasssubstrates. The plasma was produced using the fundamental line of a Nd:YAG laser with 28 ns pulse durationfocused on a graphite target. Deposition of a-CN films was carried out in a nitrogen atmosphere in the range of pressures from 3 x 10-3 to 1.5 x 10-1 Torr. The laser fluences used in this work were varied from 9 to 46 J/cm2. Wehave carried out the characterization of the optical properties, composition and morphology of the thin films as afunction of the nitrogen pressure and the laser fluence used for deposition. The study of the optical propertiesshowed that the optical band gap diminishes as the pressure is increased. The compositional characterization showed the presence of carbon, nitrogen and oxygen in the deposited films; the nitrogen content increased as the pressure increases reaching a value of 29% in atomic concentration at a pressure of 7.5 x 10-2 Torr. The surface morphology of the deposited films was characterized by a roughening of the surface as the pressure increases; it is observed also that the roughness diminished as the laser fluence increased. 2004 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94217304 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.3 Vol.17 |
| title | Synthesis and characterization of a-CNx thin films prepared by laser ablation |
| topic | Física, Astronomía y Matemáticas CNx Laser ablation Carbon nitride Optical band gap Surface morphology |
| url | https://www.redalyc.org/articulo.oa?id=94217304 |