Fluorine Modification Strategy for Switching Lithographic Polarity of Sb 2 −Oxo Clusters: Conversion of Negative‐Tone to Positive‐Tone Patterns †
Fuente:
Wiley Open Access
Saved in:
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Artículo Open Access |
| Published: |
Wiley
2025
|
| Subjects: | |
| Online Access: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|