Hybrid PIC / MC ‐ CVAE Framework for Self‐Bias Voltage Prediction and Plasma‐Circuit Coupling in Capacitively Coupled Plasma

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Suxin Bao, Jiyang Liu, Fujun Zhu, Gongzeng Liu, Haodong Zhang, Hao Xu, Yan Xing, Zaifa Zhou
Format:	Artículo Open Access
Published:	Wiley 2025
Subjects:	Contributions to Plasma Physics
Online Access:	Acceder al recurso
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