Synergistic precision microfabrication enabling high‐performance multiplexed ceramic MEMS gas sensor arrays with pulse temperature modulation functionality

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Yuxin Zhao, Jianxiu Guo, Ming Lei, Heng Yang, Hongze Jiang, Juan Wang, Shunping Zhang
Format:	Artículo Open Access
Published:	Wiley 2025
Subjects:	FlexMat
Online Access:	Acceder al recurso
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