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Concentration control of aluminum dopant in 4H‐SiC epitaxy by monomers selection on atomic step surfaces

Fuente: Wiley Open Access

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Dettagli Bibliografici
Autori principali:	Junqi Yao, Hangyang Chen, Weining Qian, Feihong Huang, Haonan Chen, Wenyu Kang, Junyong Kang
Natura:	Artículo Open Access
Pubblicazione:	Wiley 2025
Soggetti:	Information & Functional Materials
Accesso online:	Acceder al recurso
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