An experimental and computational investigation of discharge mode transitions in a partially magnetized radio frequency capacitively coupled oxygen discharge

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Jia‐Rui Liu, Xiao‐Kun Wang, Li Wang, Kai Zhao, Yong‐Xin Liu, Yuan‐Hong Song, You‐Nian Wang
Format:	Artículo Open Access
Published:	Wiley 2024
Subjects:	Plasma Processes and Polymers
Online Access:	Acceder al recurso
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