Multiscale Simulation of Capacitively Coupled Ar/CHF 3 Discharges Driven by Sawtooth‐Tailored Voltage Waveforms

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Wan Dong, Liu‐Qin Song, Yi‐Fan Zhang, Li Wang, Yuan‐Hong Song, Julian Schulze
Format:	Artículo Open Access
Published:	Wiley 2025
Subjects:	Plasma Processes and Polymers
Online Access:	Acceder al recurso
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