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Multiscale Simulation of Capacitively Coupled Ar/CHF 3 Discharges Driven by Sawtooth‐Tailored Voltage Waveforms

Fuente: Wiley Open Access

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Dettagli Bibliografici
Autori principali:	Wan Dong, Liu‐Qin Song, Yi‐Fan Zhang, Li Wang, Yuan‐Hong Song, Julian Schulze
Natura:	Artículo Open Access
Pubblicazione:	Wiley 2025
Soggetti:	Plasma Processes and Polymers
Accesso online:	Acceder al recurso
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

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