Discharge Characteristics and α–γ Mode Transition Law of CO 2 Radio Frequency Capacitively Coupled Plasma at Different Gap Distances

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Zifan Ye, Qiang Fu, Luyao Liu, Tinglu Wei, Jialun Luo, Honglin Guo, Zhengshi Chang
Format:	Artículo Open Access
Published:	Wiley 2025
Subjects:	Plasma Processes and Polymers
Online Access:	Acceder al recurso
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