Discharge Characteristics and Active Particle Distribution Mechanism of Ar/O2/CF4 Dielectric Barrier Discharge

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Jiacheng Zhang, Peng Zhang, Wenjun Ning, Huiping Shu, Shuangcheng Li, Jian Guo, Jinwei Liu, Deping Yu
Format:	Artículo Open Access
Published:	Wiley 2025
Subjects:	Plasma Processes and Polymers
Online Access:	Acceder al recurso
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