Comparison of the Coating Structure of Silicon‐Based PECVD Coatings With Varying Organic Content

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Jonas Franke, Maciej Oskar Liedke, Andreas Schäfer, Maik Butterling, Ahmed Gamal Attallah, Eric Hirschmann, Andreas Wagner, Rainer Dahlmann
Format:	Artículo Open Access
Published:	Wiley 2025
Subjects:	Plasma Processes and Polymers
Online Access:	Acceder al recurso
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