Aerosol–Surface Interactions in Low‐Pressure Misty Plasma Deposition of Nanocomposite Thin Films

Fuente: Wiley Open Access
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Bibliographic Details
Main Authors: S. Chouteau, L.‐C. Fortier, M. Chicoine, F. Schiettekatte, M. Richard‐Plouet, A. Granier, L. Stafford
Format: Artículo Open Access
Published: Wiley 2026
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