Copertina

Nonuniform Silicon Backside Edge‐to‐Center Plasma Thinning Process Using Low Global Warming Potential Gas for High Bandwidth Memory (HBM)

Fuente: Wiley Open Access

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Dettagli Bibliografici
Autori principali:	Jong Woo Hong, Chan Ho Kim, Eun Bi Koh, Joo Hyung Lee, Min Ho Hwang, Yong Jae Song, Seon Kyu Kim, Jong Soon Park, Hyun Bong Jang, Young Woo Jeon, Jun Won Jeong, Hyeong Joon Eoh, Sung Hyun Kim, Kyung Lim Kim, Eun Koo Kim, Geun Young Yeom
Natura:	Artículo Open Access
Pubblicazione:	Wiley 2026
Soggetti:	Plasma Processes and Polymers
Accesso online:	Acceder al recurso
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

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