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Nonuniform Silicon Backside Edge‐to‐Center Plasma Thinning Process Using Low Global Warming Potential Gas for High Bandwidth Memory (HBM)

Fuente: Wiley Open Access

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Detalles Bibliográficos
Autores principales:	Jong Woo Hong, Chan Ho Kim, Eun Bi Koh, Joo Hyung Lee, Min Ho Hwang, Yong Jae Song, Seon Kyu Kim, Jong Soon Park, Hyun Bong Jang, Young Woo Jeon, Jun Won Jeong, Hyeong Joon Eoh, Sung Hyun Kim, Kyung Lim Kim, Eun Koo Kim, Geun Young Yeom
Formato:	Artículo Open Access
Publicado:	Wiley 2026
Materias:	Plasma Processes and Polymers
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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