35‐1: Invited Paper: High‐quality high‐k ZrO 2 ‐based dielectric film with low leakage current
Fuente:
Wiley Open Access
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Format: | Artículo Open Access |
| Published: |
Wiley
2024
|
| Subjects: | |
| Online Access: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!