P‐7.8: Resistance Reduction in Molybdenum gate electrode by W Seed Layer

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Zecui Gao, Harald Koestenbauer, Dominik Lorenz, Christian Linke, Joerg Winkler, Hennrik Schmidt
Format:	Artículo Open Access
Published:	Wiley 2024
Subjects:	SID Symposium Digest of Technical Papers
Online Access:	Acceder al recurso
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