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P‐7.8: Resistance Reduction in Molybdenum gate electrode by W Seed Layer

Fuente: Wiley Open Access

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Detalles Bibliográficos
Autores principales:	Zecui Gao, Harald Koestenbauer, Dominik Lorenz, Christian Linke, Joerg Winkler, Hennrik Schmidt
Formato:	Artículo Open Access
Publicado:	Wiley 2024
Materias:	SID Symposium Digest of Technical Papers
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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