P‐11.8: GaN‐Based Micro‐LED Sidewall Defect Reduction via Plasma Pre‐Treatment and Atomic Layer Deposition

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Zhaoyong Liu, Kailin Ren, Yibo Liu, Feng Feng, Zichun Li, Zhaojun Liu, Hoi-Sing Kwok, Jianhua Zhang
Format:	Artículo Open Access
Published:	Wiley 2024
Subjects:	SID Symposium Digest of Technical Papers
Online Access:	Acceder al recurso
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