29‐4: TOF SIMS for OLED Film 3D Detection and Real‐Time Failure Analysis
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| Format: | Artículo Open Access |
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Wiley
2024
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| _version_ | 1867002076430598144 |
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| author | Kening Zheng Qiang Fu Bo Shi Long Chen Dongyu Gao Li Zhu Langtao Li Dengyu Wang Xuenan Pan Kai Zhang Dongfang Yang Guoqiang Tang Fujiang Jin |
| author_facet | Kening Zheng Qiang Fu Bo Shi Long Chen Dongyu Gao Li Zhu Langtao Li Dengyu Wang Xuenan Pan Kai Zhang Dongfang Yang Guoqiang Tang Fujiang Jin Kening Zheng Qiang Fu Bo Shi Long Chen Dongyu Gao Li Zhu Langtao Li Dengyu Wang Xuenan Pan Kai Zhang Dongfang Yang Guoqiang Tang Fujiang Jin |
| collection | Wiley Open Access |
| contents | 29‐4: TOF SIMS for OLED Film 3D Detection and Real‐Time Failure Analysis Kening Zheng Qiang Fu Bo Shi Long Chen Dongyu Gao Li Zhu Langtao Li Dengyu Wang Xuenan Pan Kai Zhang Dongfang Yang Guoqiang Tang Fujiang Jin SID Symposium Digest of Technical Papers By analyzing OLED film layers using the TOF SIMS method with 3D imaging capability, we can effectively improve the detection of OLED defects and understand the constitutive relationship. This inspection method can be integrated into the production line to realize process improvement and defect interception during mass production. 10.1002/sdtp.17536 http://onlinelibrary.wiley.com/termsAndConditions#vor |
| doi_str_mv | 10.1002/sdtp.17536 |
| format | Artículo Open Access |
| id | wiley_oa_10_1002_sdtp_17536 |
| institution | Wiley Open Access |
| license_str_mv | http://onlinelibrary.wiley.com/termsAndConditions#vor |
| publishDate | 2024 |
| publisher | Wiley |
| record_format | wiley_oa |
| spellingShingle | 29‐4: TOF SIMS for OLED Film 3D Detection and Real‐Time Failure Analysis Kening Zheng Qiang Fu Bo Shi Long Chen Dongyu Gao Li Zhu Langtao Li Dengyu Wang Xuenan Pan Kai Zhang Dongfang Yang Guoqiang Tang Fujiang Jin SID Symposium Digest of Technical Papers 29‐4: TOF SIMS for OLED Film 3D Detection and Real‐Time Failure Analysis Kening Zheng Qiang Fu Bo Shi Long Chen Dongyu Gao Li Zhu Langtao Li Dengyu Wang Xuenan Pan Kai Zhang Dongfang Yang Guoqiang Tang Fujiang Jin SID Symposium Digest of Technical Papers By analyzing OLED film layers using the TOF SIMS method with 3D imaging capability, we can effectively improve the detection of OLED defects and understand the constitutive relationship. This inspection method can be integrated into the production line to realize process improvement and defect interception during mass production. 10.1002/sdtp.17536 http://onlinelibrary.wiley.com/termsAndConditions#vor |
| title | 29‐4: TOF SIMS for OLED Film 3D Detection and Real‐Time Failure Analysis |
| topic | SID Symposium Digest of Technical Papers |
| url | https://sid.onlinelibrary.wiley.com/doi/10.1002/sdtp.17536 |