32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network

Fuente: Wiley Open Access
Saved in:
Bibliographic Details
Main Authors: Shuhui Qu, Kasra Yazdani, Janghwan Lee
Format: Artículo Open Access
Published: Wiley 2024
Subjects:
Online Access:
Tags: Add Tag
No Tags, Be the first to tag this record!