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32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network

Fuente: Wiley Open Access

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Dettagli Bibliografici
Autori principali:	Shuhui Qu, Kasra Yazdani, Janghwan Lee
Natura:	Artículo Open Access
Pubblicazione:	Wiley 2024
Soggetti:	SID Symposium Digest of Technical Papers
Accesso online:	Acceder al recurso
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