P‐97: Improved Electrical Performance and Realiability of a‐IGZO TFT by N2O Plasma Treatment Optimization

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Hyojung Kim, Hyesun Sung, Seungbo Shim, Dooyoul Lee
Format:	Artículo Open Access
Published:	Wiley 2024
Subjects:	SID Symposium Digest of Technical Papers
Online Access:	Acceder al recurso
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