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P‐107: High‐Resolution Periodic Patterning for Volume Manufacturing on +300mm Size Substrates Using Displacement Talbot Lithography

Fuente: Wiley Open Access

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Detalles Bibliográficos
Autores principales:	Kelsey Wooley, Harun Solak, Christian Dais, Francis Clube, Ahmed Mohammad, Iuliia Bykova, Maxime Lebugle, Thibault Seure, Mehdi Heydari, Matthew Wilson, Li Wang
Formato:	Artículo Open Access
Publicado:	Wiley 2024
Materias:	SID Symposium Digest of Technical Papers
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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