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P‐265: Tailoring SS of a‐IGZO TFT through Defect Formation Mechanism during PEALD Deposition Sequences

Fuente: Wiley Open Access

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Dettagli Bibliografici
Autori principali:	Seong Hun Yoon, Jae Seok Hur, Seon Woong Bang, Jae Kyeong Jeong
Natura:	Artículo Open Access
Pubblicazione:	Wiley 2024
Soggetti:	SID Symposium Digest of Technical Papers
Accesso online:	Acceder al recurso
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