4‐3: Silicon‐Oxide Thin Films Deposited by Plasma‐Enhanced Atomic Layer Deposition for High Mobility Oxide TFT

Fuente: Wiley Open Access

Saved in:

Bibliographic Details
Main Authors:	Heeyong Lee, Choelmin Jang, Junggon Kim, Myungsoo Huh, Cheollae Roh
Format:	Artículo Open Access
Published:	Wiley 2025
Subjects:	SID Symposium Digest of Technical Papers
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet