P‐1.13: The effects of post‐annealing and pre‐annealing treatments on PEALD deposited IGZO top gate TFT
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Wiley Open Access
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| Main Authors: | , |
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| Format: | Artículo Open Access |
| Published: |
Wiley
2025
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| Subjects: | |
| Online Access: | |
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| DOI: | 10.1002/sdtp.18918 |
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