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P‐1.13: The effects of post‐annealing and pre‐annealing treatments on PEALD deposited IGZO top gate TFT

Fuente: Wiley Open Access

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Dettagli Bibliografici
Autori principali:	Shuaiying Zheng, Yuxiang Li
Natura:	Artículo Open Access
Pubblicazione:	Wiley 2025
Soggetti:	SID Symposium Digest of Technical Papers
Accesso online:	Acceder al recurso
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