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Experimental determination of reference intensity ratio essential for accurate thickness measurement of HfO 2 ultrathin films by XPS

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Lulu Zhang, Yasushi Azuma, Akira Kurokawa, Hiroyuki Matsuzaki
Format:	Artículo Open Access
Published:	Wiley 2024
Subjects:	Surface and Interface Analysis
Online Access:	Acceder al recurso
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