Influence of aluminum addition on structure, hardness, and oxidation resistance of Ta 1−x Al x N thin films

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Jonh Yago Erikson Santos, Iago Lemos Dias, Ronaldo Lima Rezende, Givanilson Brito de Oliveira, Pedro Cardoso da Silva Neto, Fabiana Magalhães Teixeira Mendes, Roberto Hübler, Eduardo Kirinus Tentardini
Format:	Artículo Open Access
Published:	Wiley 2024
Subjects:	Surface and Interface Analysis
Online Access:	Acceder al recurso
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DOI:	10.1002/sia.7343

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