Depth Profiles of Crystallinity and Preferential Orientation and Surface Characteristics of Sputter‐Deposited CeO 2 Thin Film Buffer Layers on Sapphire Substrates Evaluated Through Two‐Dimensional Grazing‐Incidence X‐Ray Diffraction

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Bibliographic Details
Main Authors: Tatsuo Fukano, Hiroshi Nozaki, Keita Funayama, Takashi Katsuno, Tomoyuki Koganezawa, Masashi Harada, Hiroyuki Kawaura
Format: Artículo Open Access
Published: Wiley 2024
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