Eco‐friendly glass wet etching for MEMS application: A review

Fuente: Wiley Open Access

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Bibliographic Details
Main Authors:	Kyeonggon Choi, Seung‐Wook Kim, Jae‐Hyoung Lee, Baojin Chu, Dae‐Yong Jeong
Format:	Artículo Open Access
Published:	Wiley 2024
Subjects:	Journal of the American Ceramic Society
Online Access:	Acceder al recurso
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